Graphene-based UV LED photo

Schematic of the processes used to fabricate UV LED with a graphene-based transparent conductive electrode. FLG on the Cu foil was grown by CVD.

• (a) PMMA was coated on the graphene layer.
• (b) Cu foil on the graphene layer was removed by wet etching in ammonium persulfate.
• (c) Graphene with PMMA was deposited on p-GaN layer and PMMA was removed.
• (d) LED chips were fabricated by standard photolithographic processes.