The U.S Naval Research Laboratory (NRL) and University College, London, recently purchased Oxford Instruments' plasma processing Nanofab equipment using CVD, PECVD and ICPCVD techniques.
The Nanofab enables the fabrication of nanostructured materials such as graphene, carbon nanotubes and other 1D and 2D nanomaterials. It combines several essential features for high performance growth such as a high temperature heater capable of processing up to 200 mm wafers, shower head technology, automatic load lock for wafer handling as well as flexible options for liquid/solid precursor delivery.
In February 2015, the University of Manchester's National Graphene Institute purchased plasma etch equipment and deposition systems from Oxford Instruments.
Source: oxford-instruments