You are here

Mar 19, 2012

Researchers at the University of Texas at Austin, USA, have demonstrated high quality wafer-scale deposition of graphene on evaporated copper films (as opposed to copper foil) for the first time. The researchers are using Aixtron's cold-wall vertical BM (Black Magic) Pro reactor, shown below.

Aixtron BM Pro PECVD reactor

The researchers explain that a pre-annealing process is used at first to create a hydrogen-rich polycrystalline copper film, followed by the decomposition of pure methane for the growth of high quality graphene. The growth occurs at a lower processing temperature than on copper foil.