Aixtron announced today that it has received a purchase order for a 6" Black Magic Plasma Enhanced CVD (PECVD) system for graphene and carbon nanotube (CNT) growth from the University of California (UCSB).
This combined thermal CVD and plasma enhanced CVD tool is planned to be delivered in first quarter 2010 to Professor Kaustav Banerjee, who directs the Nanoelectronics Research Lab at UCSB. The PECVD system uses unique rapid heating and plasma technologies that is used to produce various types of nanotubes, including low temperature, multiwall, singlewall and supergrowth nanotubes.
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Posted: Feb 09,2010 by Ron Mertens