Aixtron announced today that the University of Massachusetts (UMass) ordered a BM-4 deposition system for processing 4-inch substrates. The BM-4 was shipped to the University’s Emerging Technologies and Innovation Center (ETIC).
The system will be used for the integration of carbon nanotubes (CNT) and graphene into a large variety of electronic applications ranging from high frequency transistors, energy storage and flexible electronics. Aixtron says that the BM is a highly flexible system which can deposit both graphene and CNT materials with precisely controlled critical surface dimensions. The BM system also features automatic process control, easy recipe editing, an integrated process camera and remote operation via TCP/IP networking.