The University of Manchester's National Graphene Institute recently purchased plasma etch equipment and deposition systems from Oxford Instruments.

These tools (PlasmaPro® PECVD and ICP-CVD deposition tools and PlasmaPro ICP etch tools) are to facilitate graphene and 2D materials' processing, and enable the fabrication of tailored substrates for graphene such as SiN membranes which are useful for both fundamental and applied research on graphene and 2D materials.

In 2012, the ICN also purchased graphene research equipment from Oxford Instruments.

Source: azonano

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