Researchers from Sweden's KTH (Kungliga Tekniska HÃ¶gskolan) Royal Institute developed piezoresistive sensors based on graphene membranes. They say that graphene increases the sensitivity of these MEMS sensors by up to 100 times while reducing the thickness.
The researchers used a graphene sheet over a cavity etched into a silicon dioxide (SiO2) film on a silicon substrate. The graphene acts as the membrane. They fabricated a prototype device, in this case a strain gauge, although this technology can be used to make other MEMS based sensors.