AIXTRON has developed, built and installed a new, specific industrial grade reactor for graphene and hexagonal Boron Nitride (hBN) processing on 200 mm epi-wafers. The new CVD tool was developed as part of the GIMMIK research project and has recently gone into operation.
The GIMMIK project aims to evaluate the production of graphene layers under industrial conditions, spotting weak points and designing ways of eliminating the sources of error. Furthermore, the transfer of the properties of graphene to electrical components by integration into a material environment are to be tested. In parallel, methods for the large-area, contact-free characterization of graphene will be developed, which do not yet exist at present. The GIMMIK research project aims to expand graphene technology for electronic components and to bring it up to a production-relevant level. Participants of the GIMMIK project include: AIXTRON SE, Infineon Technologies, IHP GmbH - Leibniz-Institut für innovative Mikroelektronik, Protemics, LayTec, RWTH Aachen.