AIXTRON’s BM Pro system, now in its 3rd generation, has been specifically optimized for high quality graphene deposition with Graphenea’s tool having the highest throughput to date. Graphenea placed the order for the 8-inch configuration deposition system during the first quarter of 2016. The tool is scheduled for delivery later this year which will be followed by the installation and commissioning of the system by AIXTRON’s European support team.Graphenea stated that its existing AIXTRON BM Pro system has been a reliable workhorse in producing graphene for the company's needs. In taking graphene to the next level, Graphenea chose an AIXTRON BM Pro tool again because of its scalable technology which addresses graphene production needs of even higher throughput and larger areas. Also, the system meets the company's requirements of high temperature operation, combined with excellent uniformity. System flexibility, low maintenance, automatic recipe execution and process support were other compelling reasons for selecting AIXTRON again.
Graphenea’s CEO, Jesus de la Fuente, comments: “This new system is part of our large investment program to introduce graphene technology in commercial devices. Our focus is to integrate graphene materials in CMOS (complementary metal-oxide-semiconductor) fabs starting with 8-inch wafers and 12-inch in the near future”.